East China Institute Optoelectronic Integrated Devices Research Institute
MEMS 器件及组件、微电子器件及组件、传感器应用系统集成的研制
Research and design of MEMS devices and components, microelectronic devices and components, and sensor application system integration
MEMS 器件及组件、微电子器件及组件、传感器应用系统集成的研制
Research and design of MEMS devices and components, microelectronic devices and components, and sensor application system integration